Plasma Processing of Materials: Scientific Opportunities and Technological Challenges - National Research Council - Books - National Academies Press - 9780309045971 - 1991
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Plasma Processing of Materials: Scientific Opportunities and Technological Challenges


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Describes the relationship between plasma processes and industrial applications, examines plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this field. This title recommends a coordinated, focused, and well-funded research program in this area.


88 pages, Ill.

Media Books     Paperback Book   (Book with soft cover and glued back)
Released 1991
ISBN13 9780309045971
Publishers National Academies Press
Pages 88
Dimensions 216 × 279 × 25 mm   ·   301 g

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