Electroceramic-Based MEMS: Fabrication-Technology and Applications - Electronic Materials: Science & Technology - Nava Setter - Books - Springer-Verlag New York Inc. - 9780387233109 - March 3, 2005
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Nava Setter
Electroceramic-Based MEMS: Fabrication-Technology and Applications - Electronic Materials: Science & Technology 2005 edition

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Focuses on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, and electronic components for high frequency communications.

414 pages, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released March 3, 2005
ISBN13 9780387233109
Publishers Springer-Verlag New York Inc.
Pages 414
Dimensions 155 × 235 × 23 mm   ·   839 g
Editor Setter, Nava

See all of Nava Setter ( e.g. Hardcover Book and Paperback Book )