Analysis and Design Principles of MEMS Devices - Bao, Minhang (Department of Microelectronics, Fudan University, Shanghai, CHINA) - Books - Elsevier Science & Technology - 9780444516169 - May 1, 2005
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Bao, Minhang (Department of Microelectronics, Fudan University, Shanghai, CHINA)
Analysis and Design Principles of MEMS Devices

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Sensors and actuators are part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. This book presents the analysis and design principles of MEMS devices.

328 pages, illustrations

Media Books     Hardcover Book   (Book with hard spine and cover)
Released May 1, 2005
ISBN13 9780444516169
Publishers Elsevier Science & Technology
Pages 328
Dimensions 188 × 262 × 23 mm   ·   752 g

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