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MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering Hsu, Tai-Ran (Department of Mechanical and Aerospace Engineering, San Jose State University) 2nd edition
MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering
Hsu, Tai-Ran (Department of Mechanical and Aerospace Engineering, San Jose State University)
Technology/Engineering/Mechanical A bestselling MEMS text. now better than ever. An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology.
576 pages, Illustrations
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | March 1, 2008 |
| ISBN13 | 9780470083017 |
| Publishers | John Wiley & Sons Inc |
| Pages | 576 |
| Dimensions | 200 × 242 × 35 mm · 1.11 kg |
| Language | English |