Handbook for Cleaning for Semiconductor Manufacturing: Fundamentals and Applications - Wiley-Scrivener - KA Reinhardt - Books - John Wiley & Sons Inc - 9780470625958 - February 4, 2011
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KA Reinhardt
Handbook for Cleaning for Semiconductor Manufacturing: Fundamentals and Applications - Wiley-Scrivener

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This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation.

590 pages, Illustrations

Media Books     Hardcover Book   (Book with hard spine and cover)
Released February 4, 2011
ISBN13 9780470625958
Publishers John Wiley & Sons Inc
Pages 614
Dimensions 263 × 185 × 43 mm   ·   1.28 kg
Language English  
Editor Reidy, Richard F.
Editor Reinhardt, Karen A.

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