Fundamental Principles of Optical Lithography: The Science of Microfabrication - Mack, Chris (Lithoguru.com) - Books - John Wiley & Sons Inc - 9780470727300 - November 16, 2007
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Mack, Chris (Lithoguru.com)
Fundamental Principles of Optical Lithography: The Science of Microfabrication

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Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.

534 pages, Illustrations

Media Books     Paperback Book   (Book with soft cover and glued back)
Released November 16, 2007
ISBN13 9780470727300
Publishers John Wiley & Sons Inc
Pages 544
Dimensions 247 × 174 × 29 mm   ·   916 g
Language English  

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