Microstereolithography and other Fabrication Techniques for 3D MEMS - Varadan, Vijay K. (Pennsylvania State University, PA) - Books - John Wiley & Sons Inc - 9780471521853 - March 30, 2001
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Varadan, Vijay K. (Pennsylvania State University, PA)
Microstereolithography and other Fabrication Techniques for 3D MEMS

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Focusing on microstereolithography and other microfabrication for 3D MEMS, this volume discusses the principles of microstereolithography for fabrication of 3D MEMS devices. It provides an account of the developments in related microfabrication and combined architecture techniques, illustrating their application in the engineering field.

274 pages, Ill.

Media Books     Hardcover Book   (Book with hard spine and cover)
Released March 30, 2001
ISBN13 9780471521853
Publishers John Wiley & Sons Inc
Pages 274
Dimensions 160 × 232 × 21 mm   ·   530 g
Language English  

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