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Delta-doping of Semiconductors E F Schubert
Delta-doping of Semiconductors
E F Schubert
This book is the first to give a comprehensive review of the theory, fabrication, characterisation, and device applications of abrupt, shallow, and narrow doping profiles in semiconductors. Such doping profiles are a key element in the development of modern semiconductor technology.
620 pages, 417 b/w illus. 20 tables
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | August 22, 2005 |
| ISBN13 | 9780521017961 |
| Publishers | Cambridge University Press |
| Pages | 620 |
| Dimensions | 188 × 247 × 35 mm · 1.18 kg |
| Language | English |
| Editor | Schubert, E. F. (Boston University) |
See all of E F Schubert ( e.g. Paperback Book )