Delta-doping of Semiconductors - E F Schubert - Books - Cambridge University Press - 9780521017961 - August 22, 2005
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Delta-doping of Semiconductors

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This book is the first to give a comprehensive review of the theory, fabrication, characterisation, and device applications of abrupt, shallow, and narrow doping profiles in semiconductors. Such doping profiles are a key element in the development of modern semiconductor technology.


620 pages, 417 b/w illus. 20 tables

Media Books     Paperback Book   (Book with soft cover and glued back)
Released August 22, 2005
ISBN13 9780521017961
Publishers Cambridge University Press
Pages 620
Dimensions 188 × 247 × 35 mm   ·   1.18 kg
Language English  
Editor Schubert, E. F. (Boston University)