Silicon Micromachining - Cambridge Studies in Semiconductor Physics and Microelectronic Engineering - Elwenspoek, M. (University of Twente, Enschede, The Netherlands) - Books - Cambridge University Press - 9780521607674 - August 19, 2004
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Elwenspoek, M. (University of Twente, Enschede, The Netherlands)
Silicon Micromachining - Cambridge Studies in Semiconductor Physics and Microelectronic Engineering

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This comprehensive book provides an overview of the key techniques used in the fabrication of micron-scale structures in silicon. It is a blend of detailed experimental and theoretical material, and will be of great interest to graduate students and researchers in electrical engineering and materials science whose work involves the study of micro-electromechanical systems (MEMS).

420 pages, 388 b/w illus. 20 tables

Media Books     Paperback Book   (Book with soft cover and glued back)
Released August 19, 2004
ISBN13 9780521607674
Publishers Cambridge University Press
Pages 420
Dimensions 188 × 247 × 27 mm   ·   808 g
Language English  
Series Editor Ahmad, Haroon
Series Editor Broers, Alec
Series Editor Pepper, Michael

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