A Guide to Hands-on MEMS Design and Prototyping - Kubby, Joel A. (University of California, Santa Cruz) - Books - Cambridge University Press - 9780521889254 - August 25, 2011
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A Guide to Hands-on MEMS Design and Prototyping

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Get the hands-on experience needed to design, fabricate and test MEMS devices with this practical guide. You will also learn to use foundry multi-project fabrication processes for low-cost MEMS projects, and end-of-chapter exercises and design challenges are provided, making this ideally suited for use in the classroom and by practising engineers.


178 pages, 132 b/w illus. 1 table 33 exercises

Media Books     Hardcover Book   (Book with hard spine and cover)
Released August 25, 2011
ISBN13 9780521889254
Publishers Cambridge University Press
Pages 178
Dimensions 236 × 159 × 19 mm   ·   428 g
Language English  

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