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A Guide to Hands-on MEMS Design and Prototyping Kubby, Joel A. (University of California, Santa Cruz)
A Guide to Hands-on MEMS Design and Prototyping
Kubby, Joel A. (University of California, Santa Cruz)
Get the hands-on experience needed to design, fabricate and test MEMS devices with this practical guide. You will also learn to use foundry multi-project fabrication processes for low-cost MEMS projects, and end-of-chapter exercises and design challenges are provided, making this ideally suited for use in the classroom and by practising engineers.
178 pages, 132 b/w illus. 1 table 33 exercises
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | August 25, 2011 |
| ISBN13 | 9780521889254 |
| Publishers | Cambridge University Press |
| Pages | 178 |
| Dimensions | 236 × 159 × 19 mm · 428 g |
| Language | English |