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Defect Recognition and Image Processing in Semiconductors 1997: Proceedings of the seventh conference on Defect Recognition and Image Processing, Berlin, September 1997 - Institute of Physics Conference Series J. Doneker 1st edition
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Defect Recognition and Image Processing in Semiconductors 1997: Proceedings of the seventh conference on Defect Recognition and Image Processing, Berlin, September 1997 - Institute of Physics Conference Series
J. Doneker
Presents an overview of techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This book addresses advances in defect analyzing techniques and instrumentation and their application to substrates, epilayers, and devices. It investigates defects in layers and devices.
524 pages, 1, black & white illustrations
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | 1998 |
| ISBN13 | 9780750305006 |
| Publishers | Taylor & Francis Ltd |
| Pages | 524 |
| Dimensions | 156 × 234 × 30 mm · 975 g |
| Language | English |
| Editor | Donecker, J. |
| Editor | Rechenberg, I. |
