Glow-discharge Hydrogenated Amorphous Silicon - Advances in Solid State Technology (Closed) - K. Tanaka - Books - Kluwer Academic Publishers - 9780792303091 - November 30, 1989
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K. Tanaka
Glow-discharge Hydrogenated Amorphous Silicon - Advances in Solid State Technology (Closed) 1990 edition

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A graduate-level description of recent Japanese research on the chemistry of amorphous silicon film deposition associated with plasma CVD, a step in producing amorphous semiconductors. Reports on studies (of microscopic processes of gas-phase reaction as well as chemical reactions on the film growin

277 pages, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released November 30, 1989
ISBN13 9780792303091
Publishers Kluwer Academic Publishers
Pages 277
Dimensions 156 × 234 × 17 mm   ·   585 g
Language English  
Editor Tanaka, Kazuyoshi

See all of K. Tanaka ( e.g. Hardcover Book )