Wafer Fabrication: Factory Performance and Analysis - the Springer International Series in Engineering and Computer Science - Linda F. Atherton - Books - Kluwer Academic Publishers - 9780792396192 - November 30, 1995
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Linda F. Atherton
Wafer Fabrication: Factory Performance and Analysis - the Springer International Series in Engineering and Computer Science 1996 edition

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Understanding the details of wafer fabrication processes and the related aspects of electronic devices can be an overwhelming task in the absence of a systematic, comprehensive view of the technology. This book presents a treatment of both the technology of wafer fabrication and the factories where it occurs.

488 pages, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released November 30, 1995
ISBN13 9780792396192
Publishers Kluwer Academic Publishers
Pages 488
Dimensions 156 × 234 × 26 mm   ·   861 g
Language English  

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