Handbook of VLSI Microlithography: Principles, Technology and Applications - William B Glendinning - Books - William Andrew Publishing - 9780815512813 - 1991
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William B Glendinning
Handbook of VLSI Microlithography: Principles, Technology and Applications

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Offers a look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and x-ray lithography.

671 pages

Media Books     Hardcover Book   (Book with hard spine and cover)
Released 1991
Original release date 2010
ISBN13 9780815512813
Publishers William Andrew Publishing
Pages 671
Dimensions 152 × 229 × 36 mm   ·   1.06 kg
Editor Glendinning, William B. (Motorola, USA)
Editor Helbert, John N. (Motorola, USA)

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