Metrology Inspection and Process Control For Microlithography X - Jones - Books - SPIE Press - 9780819421012 - April 30, 1997
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Jones
Metrology Inspection and Process Control For Microlithography X

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812 pages

Media Books     Paperback Book   (Book with soft cover and glued back)
Released April 30, 1997
ISBN13 9780819421012
Publishers SPIE Press
Pages 812
Dimensions 150 × 220 × 10 mm   ·   1.34 kg   (Weight (estimated))

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