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Metrology, Inspection, and Process Control for Microlithography: XIII (Proceedings of SPIE) Singh

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Metrology, Inspection, and Process Control for Microlithography: XIII (Proceedings of SPIE)

1052 pages, illustrations

Media	Books Paperback Book (Book with soft cover and glued back)
Released	June 30, 1999
ISBN13	9780819431516
Publishers	SPIE Press
Pages	1052
Dimensions	150 × 220 × 10 mm · 1.74 kg (Weight (estimated))

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