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Metrology, Inspection and Process Control for Microlithography XVII (Proceedings of SPIE) Herr

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Metrology, Inspection and Process Control for Microlithography XVII (Proceedings of SPIE)

1296 pages

Media	Books Paperback Book (Book with soft cover and glued back)
Released	June 30, 2003
ISBN13	9780819448439
Publishers	SPIE Press
Pages	1296
Dimensions	150 × 220 × 10 mm · 2.14 kg (Weight (estimated))

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