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Optical Microlithography XVI (Proceedings of SPIE) Yen
Optical Microlithography XVI (Proceedings of SPIE)
Yen
1848 pages
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | June 30, 2003 |
| ISBN13 | 9780819448453 |
| Publishers | SPIE Press |
| Pages | 1848 |
| Dimensions | 150 × 220 × 10 mm · 3.04 kg (Weight (estimated)) |