An Introduction to Microelectromechanical Systems Engineering - Nadim Maluf - Books - Artech House Print on Demand - 9780890065815 - November 30, 1999
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Nadim Maluf
An Introduction to Microelectromechanical Systems Engineering First Printing edition

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Provides a nontechnical introduction to the exciting field of micro-electromechanical systems (MEMS) that describe in detail the materials used in producing MEMS-including silicon, polymers, and glass and quartz substrates-as well as MEMS design and fabrication for nozzles, pressure and inertial sensors, valves, displays, and other applications. DLC: Microelectromechanical systems.

Media Books     Hardcover Book   (Book with hard spine and cover)
Released November 30, 1999
ISBN13 9780890065815
Publishers Artech House Print on Demand
Pages 265
Dimensions 158 × 24 × 232 mm   ·   644 g
Language English  

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