Victor E. Borisenko
Rapid Thermal Processing of Semiconductors - Microdevices Victor E. Borisenko Softcover reprint of the original 1st ed. 1997 edition

Name: Rapid Thermal Processing of Semiconductors - Microdevices
Price: 229.49 USD
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Author: Victor E. Borisenko

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Hardcover Book

1997 edition

(1997) $ 229.49

Rapid Thermal Processing of Semiconductors - Microdevices

Victor E. Borisenko

Softcover reprint of the original 1st ed. 1997 edition

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions.

384 pages, black & white illustrations

Media	Books Paperback Book (Book with soft cover and glued back)
Released	June 20, 2013
ISBN13	9781489918062
Publishers	Springer-Verlag New York Inc.
Pages	358
Dimensions	155 × 235 × 20 mm · 535 g
Language	English