Science and Technology of Chemical Mechanical Planarization (CMP): Volume 1157 - MRS Proceedings - Materials Research Society - Books - Materials Research Society - 9781605111308 - March 31, 2010
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Materials Research Society
Science and Technology of Chemical Mechanical Planarization (CMP): Volume 1157 - MRS Proceedings

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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

165 pages, illustrations

Media Books     Hardcover Book   (Book with hard spine and cover)
Released March 31, 2010
ISBN13 9781605111308
Publishers Materials Research Society
Pages 180
Dimensions 160 × 237 × 18 mm   ·   406 g
Language English  
Editor Balakumar, Subramanian
Editor Higgs, III, C. Fred (Carnegie Mellon University, Pennsylvania)
Editor Korach, Chad S. (State University of New York)
Editor Kumar, Ashok (University of South Florida)

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