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Flash Lamp Annealing: From Basics to Applications - Springer Series in Materials Science Lars Rebohle 2019 edition
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Flash Lamp Annealing: From Basics to Applications - Springer Series in Materials Science
Lars Rebohle
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey.
288 pages, 10 Tables, color; XVIII, 288 p.
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | August 14, 2020 |
| ISBN13 | 9783030233013 |
| Publishers | Springer Nature Switzerland AG |
| Pages | 288 |
| Dimensions | 150 × 220 × 10 mm · 474 g |
| Language | German |
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