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Dry Etching Technology for Semiconductors Kazuo Nojiri 2015 edition
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Dry Etching Technology for Semiconductors
Kazuo Nojiri
Dry Etching Technology for Semiconductors
116 pages, 123 black & white illustrations, 5 black & white tables, biography
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | November 3, 2014 |
| ISBN13 | 9783319102948 |
| Publishers | Springer International Publishing AG |
| Pages | 116 |
| Dimensions | 165 × 242 × 12 mm · 362 g |
| Language | English Japanese |
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