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Prozesstechnologie: Fertigungsverfahren Fur Integrierte Mos-Schaltungen - Mikroelektronik Gunter Schumicki Softcover Reprint of the Original 1st 1991 edition
Prozesstechnologie: Fertigungsverfahren Fur Integrierte Mos-Schaltungen - Mikroelektronik
Gunter Schumicki
500 pages, black & white illustrations, bibliography
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | March 8, 1991 |
| ISBN13 | 9783540176701 |
| Publishers | Springer-Verlag Berlin and Heidelberg Gm |
| Pages | 500 |
| Dimensions | 170 × 244 × 27 mm · 820 g |
| Language | German |
| Contributor | B. Strycharczyk |
| Contributor | F. Zimmermann |
| Contributor | H. Fehling |
| Contributor | J. Frick |
| Contributor | J.-H. Fock |
| Contributor | N. Bündgens |
| Contributor | R. Schneider |
| Contributor | T. Evelbauer |