CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms - Microtechnology and MEMS - Flora Li - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783540226802 - March 1, 2005
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CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms - Microtechnology and MEMS 2005 edition

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As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.


232 pages, 84 black & white illustrations, 11 black & white tables, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released March 1, 2005
ISBN13 9783540226802
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 232
Dimensions 164 × 240 × 20 mm   ·   539 g
Language English  

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