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Ion Implantation and Synthesis of Materials Michael Nastasi 2006 edition
Ion Implantation and Synthesis of Materials
Michael Nastasi
Ion implantation is one of the key processing steps in silicon integrated circuit technology. This book presents the physics and materials science of ion implantation and ion beam modification of materials.
263 pages, 131 black & white illustrations, 10 black & white tables, biography
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | August 9, 2006 |
| ISBN13 | 9783540236740 |
| Publishers | Springer-Verlag Berlin and Heidelberg Gm |
| Pages | 263 |
| Dimensions | 242 × 165 × 27 mm · 517 g |
| Language | English German |
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