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Low Pressure Plasmas and Microstructuring Technology Gerhard Franz 2009 edition
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Low Pressure Plasmas and Microstructuring Technology
Gerhard Franz
Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching.
732 pages, 1, black & white illustrations
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | April 30, 2009 |
| ISBN13 | 9783540858485 |
| Publishers | Springer-Verlag Berlin and Heidelberg Gm |
| Pages | 732 |
| Dimensions | 155 × 235 × 39 mm · 1.23 kg |
| Language | English |
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