Micromachines as Tools for Nanotechnology - Microtechnology and MEMS - Hiroyuki Fujita - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783642624650 - October 29, 2012
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Hiroyuki Fujita
Micromachines as Tools for Nanotechnology - Microtechnology and MEMS Softcover reprint of the original 1st ed. 2003 edition

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Addresses the use of MEMS (micro-electro-mechanical systems) and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology.

211 pages, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released October 29, 2012
ISBN13 9783642624650
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 211
Dimensions 242 × 158 × 18 mm   ·   354 g
Language German  
Editor Fujita, Hiroyuki

See all of Hiroyuki Fujita ( e.g. Hardcover Book and Paperback Book )