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Understanding Key Molecular Properties in a CVD Process Feasibility Study: Design of Volatile Non-halogenated Precursors for the Chemical Vapor Deposition (CVD) of Copper Rolf Claessen German edition
Understanding Key Molecular Properties in a CVD Process Feasibility Study: Design of Volatile Non-halogenated Precursors for the Chemical Vapor Deposition (CVD) of Copper
Rolf Claessen
212 pages
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | August 29, 2002 |
| ISBN13 | 9783831142743 |
| Publishers | Books on Demand |
| Pages | 212 |
| Dimensions | 189 × 246 × 11 mm · 385 g |
| Language | German |
See all of Rolf Claessen ( e.g. Paperback Book and Book )