Plasma Processing of Semiconductors (Softcover Reprint of the Origi) - P F Williams - Books - Springer - 9789401064866 - October 12, 2012
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Plasma Processing of Semiconductors (Softcover Reprint of the Origi) Softcover Reprint of the Original 1st Ed. 1997 edition

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Proceedings of the NATO Advanced Study Institute, Chateau de Bonas, France, 17-28 June 1996


623 pages, 101 black & white illustrations, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released October 12, 2012
ISBN13 9789401064866
Publishers Springer
Pages 613
Dimensions 156 × 234 × 32 mm   ·   866 g
Editor Williams, P. F.

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