Introductory MEMS: Fabrication and Applications - Thomas M. Adams - Books - Springer-Verlag New York Inc. - 9780387095103 - December 21, 2009
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Thomas M. Adams
Introductory MEMS: Fabrication and Applications

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Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques.

462 pages, 25 black & white illustrations, 25 colour illustrations, 20 black & white tables, biograp

Media Books     Hardcover Book   (Book with hard spine and cover)
Released December 21, 2009
Original release date 2008
ISBN13 9780387095103
Publishers Springer-Verlag New York Inc.
Pages 444
Dimensions 241 × 166 × 33 mm   ·   771 g
Language English  

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