Tell your friends about this item:
Introductory MEMS: Fabrication and Applications Thomas M. Adams 2010 edition
Price
$ 84.49
excl. VAT
Ordered from remote warehouse
Expected to be ready for shipping Jun 30 - Jul 6
Our customers say:
Add to your iMusic wish list
Also available as:
Introductory MEMS: Fabrication and Applications
Thomas M. Adams
Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques.
444 pages, 20 black & white tables, biography
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | September 7, 2014 |
| ISBN13 | 9781489984210 |
| Publishers | Springer-Verlag New York Inc. |
| Pages | 440 |
| Dimensions | 234 × 155 × 27 mm · 696 g |
| Language | English |
![Cover for Paulo Ney De Souza · Berkeley Problems in Mathematics - Problem Books in Mathematics (Hardcover Book) [Fourth Edition 2026 edition] (2026)](https://imusic-static.b-cdn.net/images/missing-tall.png)
![Cover for Loring W. Tu · An Introduction to Manifolds - Universitext (Paperback Book) [Third Edition 2026 edition] (2026)](https://imusic.b-cdn.net/images/item/original/364/9781071653364.jpg?loring-w-tu-2026-an-introduction-to-manifolds-universitext-paperback-book&class=scaled&v=1780314358)
![Cover for Functional Disulphide Bonds: Methods and Protocols - Methods in Molecular Biology (Hardcover Book) [Second Edition 2026 edition] (2026)](https://imusic.b-cdn.net/images/item/original/575/9781071651575.jpg?2026-functional-disulphide-bonds-methods-and-protocols-methods-in-molecular-biology-hardcover-book&class=scaled&v=1775139165)
![Cover for Andre Anders · Cathodic Arcs: From Fractal Spots to Energetic Deposition - Springer Series on Atomic, Optical, and Plasma Physics (Hardcover Book) [Second Edition 2026 edition] (2026)](https://imusic.b-cdn.net/images/item/original/835/9781071654835.jpg?andre-anders-2026-cathodic-arcs-from-fractal-spots-to-energetic-deposition-springer-series-on-atomic-optical-and-plasma-physics-hardcover-book&class=scaled&v=1780314416)
![Cover for Observing Photons in Space: A Guide to Experimental Space Astronomy - ISSI Scientific Report Series (Hardcover Book) [Third Edition 2026 edition] (2026)](https://imusic.b-cdn.net/images/item/original/231/9781071654231.jpg?2026-observing-photons-in-space-a-guide-to-experimental-space-astronomy-issi-scientific-report-series-hardcover-book&class=scaled&v=1780314405)
![Cover for Maternal and Child Health, Vol. 1: Global Challenges, Programs, and Policies (Hardcover Book) [Second Edition 2026 edition] (2026)](https://imusic.b-cdn.net/images/item/original/279/9781071654279.jpg?2026-maternal-and-child-health-vol-1-global-challenges-programs-and-policies-hardcover-book&class=scaled&v=1780314390)
![Cover for Peptide Nucleic Acids: Methods and Protocols - Methods in Molecular Biology (Hardcover Book) [Fourth Edition 2026 edition] (2026)](https://imusic.b-cdn.net/images/item/original/678/9781071653678.jpg?2026-peptide-nucleic-acids-methods-and-protocols-methods-in-molecular-biology-hardcover-book&class=scaled&v=1780314367)
![Cover for Bacterial Multidrug Exporters: Methods and Protocols - Methods in Molecular Biology (Hardcover Book) [Second Edition 2026 edition] (2026)](https://imusic.b-cdn.net/images/item/original/159/9781071653159.jpg?2026-bacterial-multidrug-exporters-methods-and-protocols-methods-in-molecular-biology-hardcover-book&class=scaled&v=1780315985)
![Cover for Arbuscular Mycorrhizal Fungi: Methods and Protocols - Methods in Molecular Biology (Hardcover Book) [Second Edition 2026 edition] (2026)](https://imusic.b-cdn.net/images/item/original/234/9781071653234.jpg?2026-arbuscular-mycorrhizal-fungi-methods-and-protocols-methods-in-molecular-biology-hardcover-book&class=scaled&v=1780318237)
![Cover for Hendrik Van den Berg · The Economics of Immigration: Theory, History and Policy - Population Economics (Hardcover Book) [Third Edition 2026 edition] (2026)](https://imusic.b-cdn.net/images/item/original/477/9781071654477.jpg?hendrik-van-den-berg-2026-the-economics-of-immigration-theory-history-and-policy-population-economics-hardcover-book&class=scaled&v=1780314393)
![Cover for Maternal and Child Health, Vol. 2: Global Challenges, Programs, and Policies (Hardcover Book) [Second Edition 2026 edition] (2026)](https://imusic.b-cdn.net/images/item/original/316/9781071654316.jpg?2026-maternal-and-child-health-vol-2-global-challenges-programs-and-policies-hardcover-book&class=scaled&v=1780314347)
![Cover for Collagen: Methods and Protocols - Methods in Molecular Biology (Hardcover Book) [Second Edition 2026 edition] (2026)](https://imusic.b-cdn.net/images/item/original/933/9781071651933.jpg?2026-collagen-methods-and-protocols-methods-in-molecular-biology-hardcover-book&class=scaled&v=1775081440)
![Cover for In Situ Hybridization Protocols - Methods in Molecular Biology (Hardcover Book) [Sixth Edition 2026 edition] (2026)](https://imusic.b-cdn.net/images/item/original/718/9781071652718.jpg?2026-in-situ-hybridization-protocols-methods-in-molecular-biology-hardcover-book&class=scaled&v=1778115542)
![Cover for Expression, Purification, and Structural Biology of Membrane Proteins - Methods in Molecular Biology (Hardcover Book) [Second Edition 2026 edition] (2026)](https://imusic.b-cdn.net/images/item/original/858/9781071651858.jpg?2026-expression-purification-and-structural-biology-of-membrane-proteins-methods-in-molecular-biology-hardcover-book&class=scaled&v=1777954830)
