Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration - Jean Laconte - Books - Springer-Verlag New York Inc. - 9780387288420 - April 11, 2006
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Jean Laconte
Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration 2006 edition

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Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. This title demonstrates the successful co-integration of gas-flow sensors on dielectric membrane.

292 pages, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released April 11, 2006
ISBN13 9780387288420
Publishers Springer-Verlag New York Inc.
Pages 292
Dimensions 155 × 235 × 19 mm   ·   607 g
Language English  

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