Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration - Jean Laconte - Books - Springer-Verlag New York Inc. - 9781441939579 - October 29, 2010
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Jean Laconte
Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration Softcover reprint of hardcover 1st ed. 2006 edition

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Demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. This title also focuses on sensors design and characteristics, in which a novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process.

292 pages, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released October 29, 2010
ISBN13 9781441939579
Publishers Springer-Verlag New York Inc.
Pages 292
Dimensions 160 × 240 × 16 mm   ·   435 g
Language English  

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