Ion Implantation: Basics to Device Fabrication - The Springer International Series in Engineering and Computer Science - Emanuele Rimini - Books - Springer - 9780792395201 - December 31, 1994
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Ion Implantation: Basics to Device Fabrication - The Springer International Series in Engineering and Computer Science 1995 edition

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Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framework of microelectronics.


406 pages, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released December 31, 1994
ISBN13 9780792395201
Publishers Springer
Pages 393
Dimensions 155 × 235 × 23 mm   ·   743 g
Language English  

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