Ion Implantation: Basics to Device Fabrication - The Springer International Series in Engineering and Computer Science - Emanuele Rimini - Books - Springer-Verlag New York Inc. - 9781461359524 - February 23, 2014
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Emanuele Rimini
Ion Implantation: Basics to Device Fabrication - The Springer International Series in Engineering and Computer Science Softcover reprint of the original 1st ed. 1995 edition

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Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framework of microelectronics.

406 pages, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released February 23, 2014
ISBN13 9781461359524
Publishers Springer-Verlag New York Inc.
Pages 393
Dimensions 155 × 235 × 21 mm   ·   566 g
Language English  

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