Handbook of Silicon Semiconductor Metrology - - Books - Taylor & Francis Inc - 9780824705060 - June 29, 2001
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Handbook of Silicon Semiconductor Metrology 1st edition

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Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, overlay, and dopant dose.

896 pages

Media Books     Hardcover Book   (Book with hard spine and cover)
Released June 29, 2001
ISBN13 9780824705060
Publishers Taylor & Francis Inc
Pages 894
Dimensions 185 × 257 × 49 mm   ·   1.65 kg
Language English  
Editor Diebold, Alain C.

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