Tribology In Chemical-Mechanical Planarization - Hong Liang - Books - Taylor & Francis Inc - 9780824725679 - March 1, 2005
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Hong Liang
Tribology In Chemical-Mechanical Planarization 1st edition

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The role that friction and contact play in the processes of wear and planarization on material surfaces is central to the understanding of Chemical-Mechanical planarization technology. This book offers an examination of tribological principles and their applications in CMP, including integrated circuits and basic concepts in surfaces of contacts.

200 pages, 148 black & white illustrations, 10 black & white tables, 27 black & white halftones

Media Books     Hardcover Book   (Book with hard spine and cover)
Released March 1, 2005
ISBN13 9780824725679
Publishers Taylor & Francis Inc
Pages 200
Dimensions 156 × 234 × 16 mm   ·   468 g
Language English  

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