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Handbook of Photomask Manufacturing Technology 1st edition
Handbook of Photomask Manufacturing Technology
Offers a comprehensive summary of the various areas of mask technology. This work discusses conventional masks and their supporting technologies, as well as technologies such as extreme ultraviolet, electron projection, ion projection and X-ray lithography.
728 pages, 384 black & white illustrations, 43 black & white tables, 128 black & white halftones
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | April 7, 2005 |
| ISBN13 | 9780824753740 |
| Publishers | Taylor & Francis Inc |
| Pages | 728 |
| Dimensions | 178 × 254 × 39 mm · 1.43 kg |
| Language | English |
| Editor | Rizvi, Syed |