Handbook of Photomask Manufacturing Technology -  - Books - Taylor & Francis Inc - 9780824753740 - April 7, 2005
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Handbook of Photomask Manufacturing Technology 1st edition

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Offers a comprehensive summary of the various areas of mask technology. This work discusses conventional masks and their supporting technologies, as well as technologies such as extreme ultraviolet, electron projection, ion projection and X-ray lithography.


728 pages, 384 black & white illustrations, 43 black & white tables, 128 black & white halftones

Media Books     Hardcover Book   (Book with hard spine and cover)
Released April 7, 2005
ISBN13 9780824753740
Publishers Taylor & Francis Inc
Pages 728
Dimensions 178 × 254 × 39 mm   ·   1.43 kg
Language English  
Editor Rizvi, Syed

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