Fabrication of Silicon Microprobes for Optical Near-Field Applications - Minh, Phan Ngoc (Tohoku University, Sendai, Japan) - Books - Taylor & Francis Inc - 9780849311543 - January 15, 2002
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Minh, Phan Ngoc (Tohoku University, Sendai, Japan)
Fabrication of Silicon Microprobes for Optical Near-Field Applications 1st edition

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Based upon the authors' own research and experiments, this book develops several technological approaches to using silicon micromachining techniques for fabricating microprobes without the drawbacks of conventional optical fiber probes.

192 pages, 130 black & white illustrations

Media Books     Hardcover Book   (Book with hard spine and cover)
Released January 15, 2002
ISBN13 9780849311543
Publishers Taylor & Francis Inc
Pages 192
Dimensions 150 × 220 × 20 mm   ·   409 g
Language English  
Editor Masayoshi, Esashi
Editor Minh, Phan Ngoc
Editor Takahito, Ono

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