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Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies - NATO Science Series II Yves Pauleau 2002 edition
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Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies - NATO Science Series II
Yves Pauleau
Proceedings of the NATO Advanced Study Institute, held in Kaunas, Lithuania, from 3-14 September 2001
363 pages, biography
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | April 30, 2002 |
| ISBN13 | 9781402005244 |
| Publishers | Springer-Verlag New York Inc. |
| Pages | 363 |
| Dimensions | 155 × 235 × 22 mm · 748 g |
| Editor | Pauleau, Y. |
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