Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies - NATO Science Series II - Yves Pauleau - Books - Springer-Verlag New York Inc. - 9781402005251 - April 30, 2002
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Yves Pauleau
Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies - NATO Science Series II Softcover reprint of the original 1st ed. 2002 edition

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Proceedings of the NATO Advanced Study Institute, held in Kaunas, Lithuania, from 3-14 September 2001

363 pages, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released April 30, 2002
ISBN13 9781402005251
Publishers Springer-Verlag New York Inc.
Pages 363
Dimensions 160 × 240 × 20 mm   ·   603 g
Language English  
Editor Pauleau, Y.

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