Photomodulated Optical Reflectance: A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon - Springer Theses - Janusz Bogdanowicz - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783642301070 - June 28, 2012
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Photomodulated Optical Reflectance: A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon - Springer Theses 2012 edition

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Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology.


220 pages, 51 black & white illustrations, 23 colour illustrations, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released June 28, 2012
ISBN13 9783642301070
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 204
Dimensions 155 × 235 × 18 mm   ·   453 g
Language French  

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