Photomodulated Optical Reflectance: A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon - Springer Theses - Janusz Bogdanowicz - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783642426865 - July 17, 2014
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Janusz Bogdanowicz
Photomodulated Optical Reflectance: A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon - Springer Theses 2012 edition

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Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology.

204 pages, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released July 17, 2014
ISBN13 9783642426865
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 204
Dimensions 155 × 235 × 12 mm   ·   326 g
Language English  

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