Nanoimprint Lithography: An Enabling Process for Nanofabrication - Weimin Zhou - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783642344275 - January 4, 2013
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Weimin Zhou
Nanoimprint Lithography: An Enabling Process for Nanofabrication 2013 edition

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Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes.

200 pages, 118 black & white illustrations, 107 colour illustrations, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released January 4, 2013
Original release date 2012
ISBN13 9783642344275
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 249
Dimensions 157 × 243 × 16 mm   ·   657 g
Language English  

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