Nanoimprint Lithography: An Enabling Process for Nanofabrication - Weimin Zhou - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783662510865 - August 23, 2016
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Weimin Zhou
Nanoimprint Lithography: An Enabling Process for Nanofabrication Softcover Reprint of the Original 1st 2013 edition

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Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes.

249 pages, XIII, 249 p.

Media Books     Paperback Book   (Book with soft cover and glued back)
Released August 23, 2016
ISBN13 9783662510865
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 249
Dimensions 156 × 233 × 18 mm   ·   416 g
Language English  

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