The Physics of Submicron Lithography - Microdevices - Kamil A. Valiev - Books - Springer Science+Business Media - 9780306435782 - March 31, 1992
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Kamil A. Valiev
The Physics of Submicron Lithography - Microdevices 1992 edition

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In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the physical structure of the devices and the integrated circuit connections are formed layer by layer.

493 pages, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released March 31, 1992
ISBN13 9780306435782
Publishers Springer Science+Business Media
Pages 493
Dimensions 178 × 254 × 25 mm   ·   1.09 kg
Language English  

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